JPH0362448U - - Google Patents
Info
- Publication number
- JPH0362448U JPH0362448U JP12425689U JP12425689U JPH0362448U JP H0362448 U JPH0362448 U JP H0362448U JP 12425689 U JP12425689 U JP 12425689U JP 12425689 U JP12425689 U JP 12425689U JP H0362448 U JPH0362448 U JP H0362448U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion source
- cooling pipe
- coolant
- sandwiched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000002826 coolant Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12425689U JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12425689U JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0362448U true JPH0362448U (en]) | 1991-06-19 |
| JPH0719082Y2 JPH0719082Y2 (ja) | 1995-05-01 |
Family
ID=31672188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12425689U Expired - Lifetime JPH0719082Y2 (ja) | 1989-10-23 | 1989-10-23 | イオン源用電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719082Y2 (en]) |
-
1989
- 1989-10-23 JP JP12425689U patent/JPH0719082Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719082Y2 (ja) | 1995-05-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |